Nikon NSR-204B 248nm KRF Scanner *
Configured for 200mm SNNF(Single Notch)Wafers * 
Setup for 270m Altitude *
Inline Feed Direction - Left *
Interfaced to Tel ACT 8 *
Sendai Nikon Chamber *
4EN2GK lens Type *
.68 NA Setting *
RET - Shrink Illuminator : 1/2 - annual -  conventional -  small sigma *
Chamber Temperature : 23 Degrees * 
Reticle Information : *
Reticle Size 6 inch x 6 inch * 
Bottom Pellicle Mount *
Field Size 25 x 33mm * 
Reticle Case - Nikon Standard *
2 Reticle Library's *
24 Reticle Slots *
Reticle Particle Checker * 
Reticle Bar code Reader *
Wafer Loader Information : *
Wafer Carrier Stage *
Type 3 Wafer Loader * 
Low Contact Pin Chuck * 
Cymer Laser  - ELS 6400*
Laser at Fab Level Behind Scanner * 
Focus Check Function : TTL-FC2 *
LSA, FIA Alignment *
Chip Leveling *
Multipoint Focus / Leveling ( 45Point ) *
SECS Protocol *
De-installed and under N2 Purge *
Currently Crated and Stored