Category : Electronics - Semiconductor Fabrication Manufacturer : TEL
Family : Resist Processing Equipment Model : ACT 8 Coater/Developer
Type : Cluster Tool Tracks (Resist Coater/Developer) Date Manufactured : 01/Nov/1999
GES ID : 112095 Wafer Size : 200 mm
Serial # : Please log in to view Serial Number.
Description : 
TEL ACT 8 DUV COATER / DEVELOPER *
Resist Coat Modules (2)*
BARC Coat Modules (2) *
RDS Resist pumps (16) *
Develop Modules (4) *
Was Interfaced to a NIKON S204B scanner *
Left to Right Orientation *
Left Side Input/Output Cassettes *
WEE Unit *
Temp / Humidity Controller (1) *
Chemical Boxes (2)*
AC Power Box (1) *
Thermocons (2) *
Known Issues : 3-1, 3-2 Developer rinse pipes removed *
Block Diagram Available
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The equipment being quoted is used, and is being sold “AS-IS, WHERE IS” with all defects entirely at Buyer’s own risk and reliance solely upon Buyer’s own inspection of the equipment and without reliance upon any representation or description by Seller concerning the equipment. A license may be required for any software/firmware. Seller neither assumes, nor authorizes any person to assume for Seller, any liability in connection with the sale of the equipment.