KLA AIT XP - Automated Patterned Defect Inspection *
SIngle Wafer Cassette Platen *
Configured for 200mm wafers *
PRI-Equipe Wafer Robot and Pre-aligner *
Enlosure around Wafer Loader *
4 Light Signal Tower *
Standard KLA Operator Interface Monitor *
Standard KLA Operator Keyboard, Trackball and Joystick *
Standard KLA Media Devices : FD, CD Drives *
WIndows NT Operating System *
Network and HSMS Connections *
CE Marked